Background: Leaky MOS Transistors
Two types of leakages
- Subthreshold conduction
- Leakage between source and drain
- Like having a dimmer light switch
- Carver Mead has been exploiting for years
- Many possible ways to “fix”: SOI, low temp, …
- Gate oxide leakage
- Leakage between gate and source or drain
- Like having a “hot” light switch handle
- Over last 25 years, Tox = Le / 45
- Tox = 2.1nm for 0.10um process
- Alternative gate dielectrics?