. industry semiconductor equipment founded 1986 1986 headquarters san diego california key people robert p. akins ph.d. co founder chief technology strategist of asml svp of cymer technologies richard l. sandstrom ph.d. co founder svp chief technology advisor jim koonmen ceo of cymer light source products duv light sources euv light sources and data service products for the semiconductor industry number of employees 1300 november 2015 website www.cymer.com cymer llc . an asml company is an american company headquartered in san diego california . cymer is the largest supplier of deep ultraviolet duv light sources used by chipmakers to pattern advanced semiconductor chips or integrated circuits . cymer is currently developing next generation laser produced plasma extreme ultraviolet euv light sources . as of october 2012 it was announced that cymer would be acquired by dutch semiconductor equipment manufacturer asml . the acquisition closed in may 2013 . 1 cymer san diego headquarters building 6 cymer san diego headquarters building 4 contents 1 corporate history 2 products and technology 3 cymer in the community 4 references 5 external links corporate history edit cymer was founded in 1986 by dr. robert akins and dr. richard sandstrom who met in the mid 1970s in a lab class at the university of california san diego . in 1986 the personal computer market opened a door for akins and sandstrom to apply their unique laser knowledge for the purpose of semiconductor photolithography . in 1988 cymer shipped its first light source for advanced research and development applications to support the development of semiconductor lithography . in 1990 a second generation light source shipped and the company quickly progressed shipping a total of 78 light source systems between 1988 and 1994 . in the mid 1990s cymer had established its light sources as a necessary component in the development of advanced semiconductor products and demand for its light sources began to increase . to meet this demand cymer issued its initial public offering on the nasdaq in september 1996 under the symbol cymi . the company s ipo helped provide the capital cymer needed to grow manufacturing capacity and service infrastructure as needed to meet the industry s rapid expansion . in the dot com boom of 2000 cymer sold an annual high of 494 new light source systems and in 2002 the company shipped its 2000th light source . by the end of the decade cymer had shipped more than 3 300 krf 248 nm and arf 193 nm and arf immersion light sources world wide . in june 2009 cymer shipped the world s first fully integrated lpp laser produced plasma euv lithography light source to asml holding in veldhoven netherlands for integration into its euv scanner . 2 this new type of light source produces a wavelength of 13.5 nm and will be used to pattern chips for at least the next decade . 3 in july 2005 tcz was formed as a joint venture between cymer inc. and carl zeiss smt ag to develop and manufacture a silicon crystallization process tool for use in the production of flat panel displays and oled displays . the crystallization tool uses cymer s light source technology . in january 2010 cymer announced that it would acquire carl zeiss ownership interest in the cymer zeiss tcz joint venture making tcz a wholly owned cymer company . in october 2012 cymer announced it was discontinuing its tcz business . in october 2012 dutch semiconductor equipment manufacturer asml announced that it would acquire cymer as part of their euv equipment strategy . the acquisition closed in may 2013 . 4 products and technology edit duv products cymer s light sources which comprise an installed base of more than 3 750 shipped systems are based on krf and arf technology that deliver 248 nm and 193 nm light respectively . light at these wavelengths is produced when an electrical discharge is applied to a mixture of gases krypton and fluorine krf or argon and fluorine arf . the resulting light is collected and delivered to a scanning exposure tool which is used to pattern silicon wafers . cymer s duv product line by technology includes technology wavelength product application arf immersion 193 nm xlr 600ix multiple patterning and immersion lithography 32nm node and below arf immersion 193 nm xlr 500i immersion lithography 45nm and 65nm node arf dry 193 nm xla 105 hp dry lithography 65 nm and 90nm node krf 248 nm els 7010x dry lithography 130 nm and 180 nm node krf 248 nm els 7010 dry lithography sub 100 nm node installed base products light sources installed at chipmaker fabs are maintained through cymer s onpulse support product offering . onpulse optimizes light source availability and productivity for the chipmaker . new light source feature enhancements are made available through onpulse and include support from cymer s field support organization and it infrastructure . cymer offers two data collection reporting and analysis products to enable tighter process control and improved wafer quality . onpulse plus provides real time light source parameter monitoring i.e. energy wavelength bandwidth and lot level event correlation to avoid excursions and prevent diminished yield . smartpulse delivers wafer level light source parameter monitoring and on board beam metrology to optimize the lithography process . onpulse plus is available for all xl series and els 7000 and 6000 series . smartpulse is available for all xl series light sources . lpp euv products cymer is developing a new generation of light source to enable advanced lithography beyond the capability of duv light sources . lpp euv light sources produce 13.5 nm ultraviolet light by targeting small droplets of molten tin with a pulsed high powered co2 laser . 5 6 the resulting plasma produces the 13.5 nm light which is collected and delivered to a scanner that is used to image circuit patterns on silicon wafers . euv light sources will enable photolithography below the 22 nm node and support moore s law . cymer in the community edit cymer supports a number of philanthropic organizations and events in san diego county in five areas . cymer volunteers at a civic event at the san diego food bank education co founders robert akins and richard sandstrom received their ph.d. s from the university of california san diego prior to starting cymer in 1986 . since then cymer has supported the university and multiple non profit organizations aimed at promoting excellence in education and in recognition of student scholars from all levels of education . health through corporate giving and the volunteerism of employees cymer supports health foundations that strive to find cures for life altering diseases . culture cymer seeks out and supports organizations that foster creativity in the arts and that provide opportunities for the local community to experience multiple forms of creative expression . environment cymer supports initiatives aimed at responsible disposal of electronic waste and the promotion of alternative approaches that reduce the environmental impact of technology innovation . civic cymer supports civic initiatives that help provide a safety net for those less fortunate . 7 8 references edit http www.utsandiego.com news 2013 may 30 cymer completes merger with asml shenkenberg david photonics spectra october 2009 taking semiconductor manufacturing to the extreme online http www.photonics.com article.aspx aid 40103 intel achieves major milestones in euv lithography program online http www.intel.com pressroom archive releases 2004 20040802 tech.htm http www.utsandiego.com news 2013 may 30 cymer completes merger with asml wagner christian and harned noreen nature photonics january 2010 vol . 4 no. 1 lithography gets extreme p. 24 26 online http www.nature.com nphoton journal v4 n1 full nphoton.2009.251.html brandt david and farrar nigel solid state technology september 2009 high power euv lithography light sources p. 10 online http www.electroiq.com index display semiconductors article display 368295 articles solid state technology volume 52 issue 9 features cover article high power euv lithography lightsources come of age.html cymer computer clubhouse opens at mission valley ymca online http www.computerclubhouse.org content cymer computer clubhouse opens mission valley ymca welcome to the intel computer clubhouse network online http www.computerclubhouse.org external links edit cymer.com retrieved from https en.wikipedia.org w index.php title cymer & oldid 727338449 categories lithography microfabrication companies formerly listed on nasdaq navigation menu personal tools not logged intalkcontributionscreate accountlog in namespaces article talk variants views read edit view history more search navigation main pagecontentsfeatured contentcurrent eventsrandom articledonate to wikipediawikipedia store interaction helpabout wikipediacommunity portalrecent changescontact page tools what links hererelated changesupload filespecial pagespermanent linkpage informationwikidata itemcite this page print export create a bookdownload as pdfprintable version languages deutsch edit links this page was last modified on 28 june 2016 at 09 28 . text is available under the creative commons attribution sharealike license ; additional terms may apply . by using this site you agree to the terms of use and privacy policy . wikipedia is a registered trademark of the wikimedia foundation inc. a non profit organization . privacy policy about wikipedia disclaimers contact wikipedia developers cookie statement mobile view