interconnect terminals
advanced nanoscale ulsi interconnects fundamentals and applications
p this book presents one of the new frontiers of modern electrochemistry science and technology electrochemical processes for ultra large scale integration ulsi technology for integrated circuits ics applications . this is a field which influences our day to day life and still presents major technological and scientific challenges . this book reviews ulsi technology in light of all the novel electrochemical processes which make ulsi technology possible . the book will focus on sub 100 nm cmos technology mainly on copper based metallization .